ÕV INTERNATIONAL CONFERENCE ON PHYSICS AND TECHNOLOGY OF THIN FILMS AND NANOSYSTEMS

Ivanî-Frankivsk, May, 11-16, 2015, page 48-49

Optical and electrical properties of Al-doped ZnO films deposited by ALD process on Si and glass substrate

Romanyuk V., Dmytruk N., Kondratenko O., Taborska M., Lashkarev G., Karpyna V., Popovych V., Dranchuk M., Dovbeshko G., Dmytruk I., Pietruszka R., Godlewski M.

 REFERENCE