ÕV INTERNATIONAL CONFERENCE ON PHYSICS AND TECHNOLOGY OF THIN FILMS AND NANOSYSTEMS
Ivanî-Frankivsk, May, 11-16, 2015, page 187
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ÕV INTERNATIONAL CONFERENCE ON PHYSICS AND TECHNOLOGY OF THIN FILMS AND NANOSYSTEMSIvanî-Frankivsk, May, 11-16, 2015, page 187 |
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Mechanical Nano-Lithography Over Double Layer Chalcogenide ResistLytvyn P. M., Induntyi I.Z., Malyuta S., Min’ko V.I., Lytvyn O.S., Dan’ko V.A., Prokopenko I.V.
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