ÕV INTERNATIONAL CONFERENCE ON PHYSICS AND TECHNOLOGY OF THIN FILMS AND NANOSYSTEMS

Ivanî-Frankivsk, May, 11-16, 2015, page 238

Passivation Properties of Nanostructured SiC Films on Silicon

Kostylyov V.P., Chernenko V.V., Slusar T.V., Vlasyuk V.M., Korkishko R.M., 1Semenov O.V.

 REFERENCE

1. Semenov A.V., Puzikov V.M. at all. Low-temperature fabrication of silicon carbide films of different polytypes. Semiconductors, 43, 5, (2009), 685.