ÕV INTERNATIONAL CONFERENCE ON PHYSICS AND TECHNOLOGY OF THIN FILMS AND NANOSYSTEMS

Ivanî-Frankivsk, May, 11-16, 2015, page 120

The Features of Photolithography Process Based on Reversible Photostructural Changes in Germanium Chalcogenides

Dan'ko V.A., ²ndutnyi ².Z., Lukaniuk M.V., Myn'ko V.²., Shepeliavyi P.E.

 REFERENCE

1. Indutnyi I.Z., Kryuchyn A.A., Borodin Yu. et al. Reestraciya, zberigannya i obrobka danyh. – 2013. Vol.15, ¹4. – P. 3-12.