ÕV INTERNATIONAL CONFERENCE ON PHYSICS AND TECHNOLOGY OF THIN FILMS AND NANOSYSTEMSIvanî-Frankivsk, May, 11-16, 2015, page 82 |
Properties of Thin Metal Nitride Films Obtained by Laser DeposPavlovskyy Yu., Virt I.S., Habinskij V.REFERENCE1. S. Venkataraj, D. Severin, R. Drese, Thin Solid Films, 502(1-2), (2006), 235. |